Critical Systems, Inc.

CSI’s Valve Manifold Boxes (VMB’s) are designed and built by premier gas system OEMs, such as Air Products, Praxair, Air Liquide, and Semi-Gas, and adhere to the strictest safety and purity requirements of the semiconductor industry. All of CSI’s VMB’s inventory was operated and decommissioned by industry professionals, and are in excellent condition.Customizing and Reconditioning Gas distribution boxes are modified for the particular gases required by customers. Components are tested, cleaned, and (if necessary) replaced. The controller software is reconfigured, and the system is calibrated to provide gas pressures and flow rates that your process demands.

The Delatech CDO 858859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases. Delatech scrubbers are also widely used in Thin Film processes. This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a PrimarySecondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.

Critical Systems, Inc. has a large inventory of professionally decommissioned free standing and wall mount process gas rack units, as well as gas cabinets and valve manifold boxes. As with all products bought for inventory, we start with the finest pre-owned gas systems available, inspecting each piece of equipment prior to purchase. As with all of gas systems, CSI rack units are thoroughly tested – cleaned, customized, and calibrated before being CSI certified.50 point checklist ensures that a CSI Certified Rack Unit meets the highest standards of purity and quality. Full analyticals — particle, moisture and oxygen testing — are available upon request.

For applications involving High Flow, Bulk Delivery, Highly Corrosive Gases requiring Hastelloy Process Piping or Mini-Gas Systems, Critical Systems offers line of New Gas Cabinets and Valve Manifold Boxes. Designed around the specific requirements of your process, systems are designed and built using only industry proven components, and advanced fabrication procedures garnered over 16 year history of providing the finest Reconditioned Systems available. All new Gas Systems receive New Process Panels, Interconnect Sections and Venturi Assemblies. Options for New or Reconditioned Purge Panels allow for cost reductions where desired. The control systems for New Gas Systems center around the Air Products™ AP10 platform. One year CSI “No-Hassle” warrantees are standard, with optional 5 year warrantees on the controllers. Technically Advanced Systems – Process purity, minimal maintenance and operator safety go into the design of every Critical Systems gas cabinet and VMB. Over 1600 cabinets and hundreds of applications, coupled with a technical staff of ex-Fab managers, spec gas managers and gas system technicians from major 300 mm semiconductor Fabs produce the experience that goes into the designs of all CSI products. Optimized purge sections, high capacity venturi designs, component selection and precise fabrication procedures build systems that simply last, with minimal requirements for maintenance.