FM Industries, Inc.

Thermal Sprayed Electrostatic Chuck Design

FM Industries employs a dedicated R&D and engineering staff that is committed to providing each customer with individualized service and design to produce an electrostatic chuck (ESC) that suits their application. Our engineers work cooperatively with customers to provide an optimized total ESC solution for improved tool performance. Our proprietary manufacturing process enables FMI to fabricate ESC’s from 100mm to 450mm with customer specified geometries. All ESC’s feature high clamping forces, quick chuck and de-chuck times, and anti-arc design for high bias applications. Our advanced technology gives customers clamping capability of a wide variety of materials that are not only conductive but also dielectric such as Glass and Sapphire. All ESC’s are tested to fully meet customer specifications.