Innovent Technologies LLC

Innovent Technologies is the leading supplier to semiconductor equipment OEMs and FABs of collimators used in the physical vapor deposition (PVD) processing of wafers and flat panel displaysStainless steel, titanium, Inconel and specialty high-temperature alloys Bare metallic material Grit blast textured finish Metallic flame spray textured finish Integral shields, flanges, clamp rings, or core only

Innovent Technologies supplies a range of parts for our OEM customers’ substrate handling solutions. Whether it’s a simple lift pin or a complex, tight tolerance, complete lifting mechanism, Innovent Technologies can design and build a solution for you. Components are tested on our 36"W x 48"L x 31"H automated CMM for a high degree of flatness and true positioning of wafer placement, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom.

nnovent Technologies now supplies multiple designs and configurations of substrate cool plates to fit different application needs. We have expanded our portfolio to include several cold plate, cooling rings, and other customized substratebearing cooling devices. These components are tested for a high degree of flatness, pressure rating, and system-fit, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom.