United States
Our Products
The Norcimbus Bulk Chemical Delivery System incorporates the exclusive Power Purge V automation-based control system. This flexible control system, coupled with one of the many standard Norcimbus UHP chemical delivery panels, provides a complete liquid chemical delivery system. Norcimbus has designed specific chemical delivery systems for applications such as bulk chemical delivery, multiple tool chemical distribution, multiple chemistry distribution, and integrated onboard tool chemical delivery. Engineered chemical delivery systems utilize technology in which the source chemical can be bubbled with a carrier gas, heated to vaporization, delivered in liquid form with a push gas, and or delivered utilizing a patented control technique. Any delivery system can be configured for multiple panel crossover to ensure uninterrupted chemical delivery. Norcimbus has manufactured chemical delivery systems for many chemistries, including SiCl4, TEOS, TMB, TMPi, SiHCl3, TDEAT, and TiCl4.
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