Inspired by the growing variety of Microelectromechanical systems (MEMS), Polytec has developed an innovative line of microscope systems for the measurements of MEMS dynamics and topography.
The MSA-500 Micro System Analyzer is the premier, fully-integrated, measurement tool for the analysis and visualization of structural vibrations and surface topography in micro structures. For wafer-level testing, all systems can easily be mounted onto manual or fully automated probe stations