Our Products

Unmatched in Semiconductor process fluid heating. Single chamber sizes up to 18kW

FEATURES

Ruggedly designed for the most demanding recirculation or single pass chemical applications. Able to achieve the highest temperature heating, up to 210C. All fluoropolymer wetted surfaces for virtually any wet chemistry application. Thick walled chamber provides long service life in the harshest high temperature applications. Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes any chemical permeation and ensures long element life. Certification: CE, UL, Semi S2 and S3

Provides precise control for consistent plating and etch rates in most aqueous processes.

FEATURES

Large (.56 high), easy to read LED display. Fluoropolymer (FEP) covered 10-foot (3m), 1000-ohm platinum RTD sensor included standard with the control. Vapor resistant, NEMA 1, IP21, gasketed 18 DIN plastic enclosure with sealed tactile switches and stainless steel hardware. Certifications: cULus and CE compliant.

Provides automated control and consistent liquid levels for most aqueous processes and waste treatment tanks, or when leak detection is required.

FEATURES

Helps protect against fires and tank damage associated with low-level conditions. ESP model: mounts on the outside of plastic tanks and senses up to .984 inches (25mm), so no direct immersion is required. ESPV model: for direct immersion applications (vertically mounted). Certifications: cULus and CE compliant.

Proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications
FEATURES

PTFE heating elements are in direct contact with the DI water for maximum efficiency and fast response. Capable of temperatures up to 95 C and pressures up to 100 PSIG at essentially any flow rate. Uptimes of greater than 99% can be expected. Patented heater purge ensures heater integrity and longevity. Thousands of heater installations worldwide. Experienced engineering and worldwide field service support. Certification: SEMI S2S3

Provides precise control for consistent plating and etch rates in most aqueous processes.

FEATURES

Large (.56 high), easy to read LED display. Fluoropolymer (FEP) covered 10-foot (3m), 1000-ohm platinum RTD sensor included standard with the control. Vapor resistant, NEMA 1, IP21, gasketed 18 DIN plastic enclosure with sealed tactile switches and stainless steel hardware. Certifications: cULus and CE compliant.

For virtually any wet chemistry application.

FEATURES

Ideal for one-pass cooling of chemicals dumping to waste stream and innovatively eliminates high costs associated with water aspiration. Less surface area required for same BTU exchange compared to most other fluoropolymer exchangers. Heavy wall, large diameter tubing improves circulation and minimizes pressure drop.

Provides extremely high thermal transfer for package size.

FEATURES

Patented fabrication process ensures consistent, high quality production. No gaskets to fail. TIG welding is used on the sheet edge (which separates Circuit A from Circuit B). Offers easy installation and servicing. Manifolding is simplified for larger applications. Heat loss is low, requiring little or no insulation.

The efficiency of these elements offers an economical alternative for replacement parts.

FEATURES

Heavy wall quartz sheath in standard 58 inch diameter . Capable of reaching full heat in 40 to 65 seconds. Watt densities up to 50 wattssquare inch (8 wcm). Thermal shock resistance: excellent. Peak wavelength: 2.55 microns. Maximum power density: 1.3 to 1.75kWft. Certification: CE compliant.

Designed for the high demands of corrosive chemical heating or cooling.

FEATURES

Heavy wall, 20-gauge metal tubing available in steel, 316 stainless steel and titanium. Durable, low profile design for tanks with limited space (except zirconium material). Every inch of coil surface is active exchange area.

Excellent chemical resistance to aggressive acids.

FEATURES

PTFE sleeved 304 stainless elements inert to most solutions up to 212F (100C). Low watt density design 10 wattssquare inch (1.5wcm). Vapor resistant, flame retardant polypropylene terminal enclosure with 3 ft (.9m) flexible PVC liquid tight conduit. Grounded internal metal element and built in thermal protector. Replaceable P1 protector standard for solutions up to 180F(82C). Certification: cULus (except 600 volts)