Technical Equipment Sales

Model 5511 Ceiling Emitter Digital Ionizer The Digital Ceiling Emitter Model 5511 provides uniform ionization throughout the open areas of a clean room. Powered by the Model 5580 or 5520 controllers with digital technology, the Model 5511 is a complete communication system enabling either centralized control of individual emitters through bi-directional communication, or direct field programmability of the ceiling emitters with the Model 5570 hand held infrared (IR) remote control. Features: Creates a room system along with a Controller Model 5520 or 5580, and Hand held Remote Model 5570 Ideal in photolithography and mask processes Varying rod lengths Patented pulsed DC technologies with local and system-wide adjustment controls

The AeroBar® Model 5225 is specifically designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, charge can be reduced to comply with E-78 Level 1, the most stringent requirement of semiconductor manufacturers. Both the Model 5225 and the Interface Module Model 5200-IM6T are CE-certified, complying with SEMI S-2 specifications. The Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Tight integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling. System alerts and messages are displayed at the tool controller for easy notification, taking the place of older, line signal notification systems. Features: • Six different bar lengths including three EFEM-specific lengths: 22, 28, 44, 64, and 84 inches with 36, 56, and 76" EFEM lengths • Integrated software package • Operates with Interface Module Model IM6T for power • All parameters are settable The Sensor Model 5200-SR operates with the Digital AeroBar Model 5225 and Interface Module Model IM6T to create a complete ionization system.

Affordable, Single-fan Field Charge Sensor The Novx Series 3150 is an affordable field charge sensor and controller. It will provide the flexibility to precisely monitor and control an ionizer with a programmable monitor and has application for stand-alone field charge detection for realtime monitoring and alarm. Data output from this instrument provides a proactive solution when interfaced. Report alarm conditions to other Novx instruments andor connect directly to PEMS to report warning or alarm conditions for process control. Features & Benefits: Field charge detection Ionizer balance detection Closed-loop control Audible alarm Programmable warning and alarm set points LEDs for in-balance warning and alarm Powered by ionizer Small footprint and light weight Digital controller Microprocessor-based Integral antennasensor Reduce process variations and provide continuous monitoring Control ionizer balance to +-0.2V Consistent cost and performance advantages over any other possible solution

The Ceiling Emitters Model 5509 provides uniform ionization throughout the open areas of a clean room. Mounted onto the ceiling surface or inside a flush mount channel, Model 5509 ceiling emitter maintains aesthetics without disrupting clean room laminar airflow or compromising the integrity of operating Class 1 clean rooms. In a matter of seconds, the Model 5509(e) ceiling ionization system eliminates ESD and particle contamination. Features: Low voltage operation (24 VAC) Individually adjustable ion emission output Feedback with alarms available at each emitter Patented pulsed DC technologies with local and system-wide adjustment controls

The Point-of-Use Ionizing Blower Model 6422e is the most efficient small blower of its kind for controlling static discharge in hard-to-reach areas. The Model 6422(e) meets the challenge of cost and features that your process demands by delivering worry-free ionization. Features: Patented IsoStat® Technology 24 VDC or 24 VAC input Facility Monitoring System (FMS) interface Operational failure alarm

The Critical Environment Ionizer Model 5810i is an innovative electrostatics management solution engineered for the needs of today's clean rooms. Designed and tested to meet Class 10 clean room requirements (configuration dependent) and the tightest balance specifications, the Model 5810i can operate with external sensors to maintain precise balance (better than ±1 volt) by altering ion output and adapting to environment changes. With the established reliability of steady-state DC, the established method for eliminating the effects of ESD and ESD-induced electromagnetic interference (EMI) in high-tech facilities, the Model 5810i delivers maximum ion output where and when you need it. Features: Aluminum chassis (Model 5810i) or stainless steel (Model 5810is) Two fans (32" length) Three fans (40 or 44" lengths)