The AeroBar Model 5225 is specifically designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, charge can be reduced to comply with E-78 Level 1, the most stringent requirement of semiconductor manufacturers. Both the Model 5225 and the Interface Module Model 5200-IM6T are CE-certified, complying with SEMI S-2 specifications.
The Model 5225 is easily integrated with your tool, using either pre-compiled routines or open-source code examples. Tight integration with tool interfaces means a less costly solution to ionization, in addition to the benefits of reduced maintenance cost and better alarm handling. System alerts and messages are displayed at the tool controller for easy notification, taking the place of older, line signal notification systems.
Features:
Six different bar lengths including three EFEM-specific lengths: 22, 28, 44, 64, and 84 inches with 36, 56, and 76" EFEM lengths
Integrated software package
Operates with Interface Module Model IM6T for power
All parameters are settable
The Sensor Model 5200-SR operates with the Digital AeroBar Model 5225 and Interface Module Model IM6T to create a complete ionization system.