TES Clean Air Systems

United States

Typically a Custom Fan Filter is not UL listed, and so for many customers CE marking is an alternative. To CE mark we typically requires adding a an EMIRFI filter, circuit breaker, and shielded wiring.

Typically FFUs are not made over 12 square feet in size due to ergonomic restrictions, as well as the practicality of packaging and shipping the completed product. Additionally, there are some practical complications in making a single HEPAULPAPTFE filter over 72” in length. When a tool has a clean environment that is being designed to operate as a single “zone” with a goal of identical pressure or flow throughout, we use a “Primary””Secondary” approach. The “Primary” FFU” has the speed control or pressure control , and powers the lights and ionizers, if required. Meanwhile the “Secondary” FFU(s) gets itstheir control from the “Primary FFU”. In this way a very large clean zone can be controlled from a single point on the “Primary FFU”. See the speed controlpressure control section for details on the methods of controlling the “Primary” FFU, and thereby the entire zone.

A useful feature for a Fan Filter is integral lighting. Ideal lighting would be centered in the clean space, take up no space, be of high quality, and have the longest life possible so change outs are not necessary. The answer is TES-Clean Air Systems patent pending LED “Lumifilter”. The long life LED lights sources are the most energy efficient, high quality light sources on the market today. Unlike with commonly used fluorescent bulbs, there is no concern that inadvertent breakage will pollute your wafers with mercury vapors. Additionally, having the FFU provide lighting is one more thing off your plate, shortening your “to do” list on your next project.

Increasingly in controlled environments the presence of molecular levels of contamination in the air is damaging to the process being performed. The requirements in high end semiconductor processes are currently being joined by Hard Disc manufacturing and Life SciencesPharmaceutical. In some cases the customers need is so critical that the entire facility is filtered for AMCs but due to the very high cost of this approach it is more common that only the most critical process steps are filtered for AMCs, and this approach involves specialty Fan Filters. Typically 3 steps are involved in the successful implementation of an Airborne Molecular Contamination (AMC) removal program. Determine the AMC specie(s) that are causing your process the problems you are observing. TES can assist you in sourcing qualified labs to do this work. Geography would play a roll in our referral process to a qualified lab, but typically we would recommend Balasz Labs in Fremont, Ca. After the species and concentration levels are known then we can involve one of several high end strategic partners we work with to define and specify the actual AMC product, taking into account your desire for removal efficiency, expected life, and price point. At the end of this step we will have a product specified that will remove a guaranteed amount of the species for a guaranteed amount of time. PHD scientists provide all the data and the main deliverable is a chart of expected filter life, and efficiency during that lifetime Design and deliver a custom FFU product that will deliver AMC and particulate air into the clean space.

When the design criterion calls for fan replacement without removing the Fan filter from its mount the “Quik-Change” motor mount is called for. The fancapacitormotor mountmounting plate becomes a single unit that is complete with quick disconnect fittings and allows a failed motor to be changed in the field in a matter of minutes.