Garden & Outdoor Furniture #5144170

Wafab International designs and manufactures a complete line of automated wet benches, designed to provide maximum device throughput, operator safety and ease of use. Operator errors are virtually eliminated through the use of the scheduling software and the automated transport system providing highly controlled, repeatable processing of the most sensitive wafer substrates.

Wafabs VLF front access manual wet benches are compatible with class 100 or better clean rooms. The open process area allows for laminar air to flow across the work surface capturing particles and fumes and directing them through the exhaust slots and out of the clean room. The open base provides for cleanroom air return, and reduces particle build up underneath the system. The wet process stations are designed for complete modularity giving the flexibility to change processes with minimal downtime and expense.

Wafabs semi-automated wet benches are designed for processes using two or more processing tanks. The transfer system can be set in a front to back or left to right linear configuration and is used for single tasking. The linear transfer systems are designed to hold single or dual wafer cassettes up to 200mm or a single 300mm wafer cassette. The control system includes a PLC and color touch screen interface. The PLC is programmed to control all aspects of motion, process temperature control, and rinse features. The PLC incorporates several levels of password protection, and is capable of multiple process recipe storage. The color touch screen displays bench parameters. The touch screen has several screens for maintenance, recipe setup, tank setup, operation, and alarm status.