Measurement Gauges & Fittings #4954849

EBARA Technologies, Inc. Pirani gauges offer wide measurement range of atmosphere to medium vacuum (5 e-4 Torr) in a compact package. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints.

EBARA Technologies, Inc. PiraniIonization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supplydisplay units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. PiranIonization gauges are available with either KF or CF flanges.

EBARA Technologies, Inc. PiraniCapacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supplydisplay units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. PiraniCapacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.