Our Products

Measurement Gauges & Fittings 3 Products available
Pumps, Pumping Machines & Parts
2 Products available
- MODEL PJ
- MODEL ET
Filters
1 Products available
- MODEL NDC
Others Products 4 Products available

Our Products

Leading Manufacturer, Supplier & Retailer of DRY PUMP GAS ABATEMENT SYSTEMS, MODEL EGC, REVERSE PULSE TECHNOLOGY and Ozone Systems.

PIRANI GAUGE - MODEL EGP

EBARA Technologies, Inc. Pirani gauges offer wide measurement range of atmosphere to medium vacuum (5 e-4 Torr) in a compact package. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints.

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DRY PUMP GAS ABATEMENT SYSTEMS

pump quantity 1~8 units

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARAs best know-how. The system is designed in accordance with customers facility needs for customized integrated solutions.

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MODEL EGC

UNIT mbar (Torr)
EGPC550 Tungsten 5 x 10-5 .1500 (3.8x10-5 .125)

Your complete solution for process measurement and control. Compatible to all active gauges, the Model EGC controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status

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MODEL ET

Cooling system Water cooling
Weight, kg (lb) 10 (22)

The ET Turbo pump is equipped with five-axis magnetic bearings to ensure high-speed rotor rotation and position. Operating in a wide pressure range, the ET Turbo pump is designed to withstand highly reactive gases with its corrosion resistance.

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REVERSE PULSE TECHNOLOGY

Leak Rate: 1x10-7 mbar L/sec (min)
PTFE Media 99% efficiency @ 0.3 micron

EBARA designs and manufactures application-specific filtration products capable of operating in harsh environments while safeguarding operators and mission critical equipment. The EBARA Reverse Pulse Filter integrates proven reverse pulse technology to extend maintenance intervals, resulting in increased run time, fewer element changes, and reduced maintenance costs.

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MODEL NDC

EBARA's NDC are compact, magnetic pumps that transport and pressurize ultra-pure water and liquid chemicals to meet the requirements of the semiconductor and liquid-crystal manufacturing processes. Hydrodynamic bearings eliminate mechanical contact and the resulting particle emissions from the pump interior. Additionally, metallic ion elusion and pulsation have been virtually eliminated.

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MODEL PJ

Pump discharge pressure, Mpa 5, 10
Discharge flow rate, mL 50 (max)/stroke
Required air pressure Mpa 0.4

EBARA's PJ delivers high-pressure plunger pumps for single wafer jet cleaning with ultra-pure water. Pump surface purity is maintained through electrolytic polishing of the interior surfaces. Simple pump construction has minimized the area which comes in contact with the ultra-pure water and has eliminated the mixing of particles produced from the seal parts with the jet water.

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PIRANI/IONIZATION GAUGE - MODEL EGPI

pressure range 10-8 to 10-2

EBARA Technologies, Inc. PiraniIonization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supplydisplay units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. PiranIonization gauges are available with either KF or CF flanges.

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PIRANI/CAPACITANCE GAUGE - MODEL EGPC

UNIT mbar (Torr)
EGPC550 Tungsten 5 x 10-5 .1500 (3.8x10-5 .125)

EBARA Technologies, Inc. PiraniCapacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supplydisplay units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. PiraniCapacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks.

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Ozone Systems

RAW GAS FLOW RATE (SLM) 2.5
OZONE CONCENTRATION 9.3
OZONE CONCENTRATION 200
GAS PRESSURE AT DISCHARGE 150 (21.7)

The ozonizer operates on the corona discharge principal (passing oxygen through an electric field of high potential) and employs a high performance trench discharger that differs from conventional ozone generator methods. The trench discharger is designed to have more surface area and is cooled by city water, creating large concentrations of ozone per unit discharge area.

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