FM Industries, Inc.

FM Industries, Inc. has been providing prototype and production manufacturing machining solutions for over 20 years. We are focused on efficiency and quality through high speed machining, cellular manufacturing, critical process control and supplier management. Our expertise is extensive and ranges from horizontal milling, vertical milling, turning, 5-axis machining including supporting processes such as welding, brazing, heat treating, and much more. We use the most advanced, state-of-the-art equipment and software. To compete in the highly competitive global markets, we are focused on effective process design and control to provide products and services that are consistently high in quality, on time and at prices that are competitive. We provide our customers with a range of products including complex components, electrostatic chucks, load locks, chambers, showerheads and more. We have expertise working with a wide variety of materials and coatings. Customer orders, manufacturing scheduling, product movement, inventory and material orders are controlled and tracked using a fully-integrated ERP system. Before shipping products to our customers, they are subjected to rigorous testing and inspection to assure product quality. Please contact us with any questions and see below for details.

FM Industries, Inc. specializes in assembly, integration and testing of critical electro-mechanical assemblies in our class 10, 000 cleanroom, . A wide variety of products such as, chamber modules, throttle valves, cathodes, lid assemblies, dome temperature control units and electrostatic chucks are assembled and tested. Cleanroom inspection capability includes dimensional, helium leak check, rate of rise, performance and functional testing. Adjacent to the cleanroom assembly area is an additional class 10, 000 cleanroom dedicated to Autoclave bonding. Typical applications include bonding dissimilar materials using compliant, thermally conductive sheet adhesives. Supporting equipment includes fully automated vacuum prebake ovens for out-gassing adhesives, cutter plotters for accurate material geometry and clean room ovens for post bond baking. Finished parts are thoroughly inspected for critical alignment, bond integrity and performance requirements. Please contact us with any questions, and see below for additional details

FM Industries, Inc. anodizing process strengthens and protects Aluminum alloys by converting the Aluminum alloy surface to Aluminum oxide. Our process is completely traceable and repeatable with 60, 000 data points collected per anodizing run. Working primarily with 5000- and 6000-series alloys, we can also accommodate custom alloys. Our electrolytic solutions include standard sulfuric acid, standard mixed acid, and custom multi-mixed acids. Our rack tanks and fully automated system, including a robotic hoist, can handle parts up to 78” long, 24” wide, and 48” high. Parts can weigh up to 1, 000 lb. Anodize film thicknesses up to 4 mils on 6000 series and 5 mils on 5000 series are available. All coatings are fully tested for thickness, abrasion resistance, and roughness and can meet HCL bubble test resistance of greater than 8 hours. Voltage breakdown can exceed 1000 Vmil. FMI offers a chemical engineering staff that works with each individual client to develop an anodizing solution that is custom designed to each application. For more information on our custom electrolytic and hard anodizing services, please see the table below or contact us directly. We look forward to working with you.

FM Industries, Inc. has extensive experience handling projects for the semiconductor industry, this is why this client came to us for automated hard anodizing of high purity alloys. Our state-of-the-art hard anodizing process is fully automated and offers controls on over 28 operating parameters. To begin the anodizing process, the surface was prepared to customer specifications. Sealing surfaces were polished to < 16 min Ra. To increase corrosion resistance, this 6000 series high purity alloy were anodized with a next generation multi-mixed acid electrolyte. Our automated process collects up to 60, 000 data points per run in real time and we custom engineer to meet the specific needs of the customer.

In semiconductor processes, as critical dimension gets smaller, more bias RF power is applied to induce more DC bias on wafer. This in turn makes the requirement for backside gas pressure higher and plasma erosion more critical in electrostatic chuck performance. To overcome these challenges, FMI invented and commercialized a new advanced ESC using hybrid technology. Additionally, To satisfy the high demand for ESC’s to clamp dielectric substrates such as sapphire, glass, etc., FMI has developed new interdigitated electrode designs and manufacturing processes. This advanced design and manufacturing methodology allow customers to choose an optimal design based on their specific process requirements.

FSPSSM Thermal Spray Coating Services have a proven track record in meeting the most difficult and complex coating challenges. Our expert chemical, mechanical, and material sciences engineering staff routinely manage complex application development projects and custom coating R&D requests. Our most common substrate is aluminum, both anodized and bare, but we also have experience with a variety of other materials. Standard coatings include Yttria, Alumina, and Cophase Oxides. We can also create custom blended coatings to fit specific application needs. Substrates are prepared for coating by our proprietary robotic surface texturing process and a precision “pre-coat” cleaning. Our coatings feature low plasma erosion rates, high corrosion resistance, high service temperature, high dielectric strength, and low porosity. Quality control parameters include hardness, porosity, micro structural analysis, and adhesion. We have a fully equipped Research and Development laboratory that is actively working on “next generation” coatings and materials for 20nm technology and beyond. FMI is dedicated to the semiconductor industry and has met the challenge of stringent trace metal and particle requirements. For more information about our thermal spray coating services, please see the table below or contact us directly.